Effect of Passivation on BEOL-Compatible Oxide Semiconductor Transistor

Journal

2024 International VLSI Symposium on Technology, Systems and Applications (VLSI TSA)

Part Of

2024 International VLSI Symposium on Technology, Systems and Applications, VLSI TSA 2024 - Proceedings2024

ISBN (of the container)

979-835036034-9

Date Issued

2024-04-22

Author(s)

Chi-Yuan Kuo

Tsung-Tien Lo

Yun-Ping Chiu

Wei-Chen Lin

Hsien-Yi Liao

Chi-Hang Tsai

Sheng-Chia Lu

Hsin-Chu Chen

Haw-Tyng Huang

Po-Chun Yeh

DOI

URI

Event(s)

2024 International VLSI Symposium on Technology, Systems and Applications, VLSI TSA 2024

Publisher

IEEE

Type

conference paper