Extraction of Frequency Dependent Macromodels for Mems Squeezed-Film Damping Effects

Resource

Journal of Mechanics 21 (4): 227-234

Journal

Journal of Mechanics

Journal Volume

21

Journal Issue

4

Pages

227-234

Date Issued

2005

Date

2005

Author(s)

Yang, Yao-Joe Joseph

Chien, Chih-Ming

Kamon, Mattan

Rabinovich, Vladimir L.

Gilbert, John R.

URI

Type

journal article

File(s)

Name

08.pdf

Size

2.6 MB

Format

Adobe PDF

Checksum

(MD5):f5a689531a55b85e1c201d3f41caa5cc