Process Parameters and Mechanical Properties of Two-Photon Polymerization Microfabrication
Date Issued
2015
Date
2015
Author(s)
Li, Tzu-Jui
Abstract
Two-Photon Polymerization (TPP) was an accurate manufacturing method with high resolution focal spot for micron and sub-micron level complex structure. It was generally applied for MEMS, micro mechanical components, biomedical micro elements and other engineering fields. Previously, researches were concentrated on the development of photosensitive resins, control of the fabrication stage and the capability of manufacturing complicated structures, and less relative researches for the mechanical properties. However, in practice, we would need to realize the mechanical properties like young’s modulus to design the component. Because the structure of TPP was micron scale, conventional measure method like tensile and fracture test was difficult to implement. Therefore, in this thesis, we would apply optical tweezer to drag the cantilever beam, and obtain the deflection to derive the Young’s modulus. Moreover, by adjusting the parameter of laser power, distance of voxel and UV light exposal time, we could understand the relationship between young’s modulus and these parameters. Furthermore, during manufacturing the cantilever beam assembly, we had some experience for decreasing the fail rate of TPP. We would discussed those items and provide some possible solutions in this thesis. By knowing the parameter of mechanical properties, we believe the application of TPP would be extended widely in the future.
Subjects
Two-Photon Polymerization
mechanical property
young’s modulus
Type
thesis
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