Improvement of Ridge Waveguide and TE/TM Mode Splitter by Wet Etching Method
Date Issued
2006
Date
2006
Author(s)
Chen, Yi-Huan
DOI
zh-TW
Abstract
A tunable optical polarization splitter with a ridge structure fabricated by a new wet etching method is presented. In the past, when a ridge structure was to be fabricated on a lithium niobate substrate, benzoic acid was often used as the source of proton exchange. In this work, a new wet etching method that uses a mixture of benzoic acid and apidic acid as the proton exchange source is demostrated. As the etched ridge structure has a larger depth-to-width ratio, a lower tuning voltage can be achieved for the improvement of the splitter.
The tunable mode splitter, fabricated on a z-cut y-propagation lithium niobate substrate is essentially a Y-branch waveguide with a nickel-indiffused waveguide and an annealed proton-exchanged (APE) waveguide. In particular, the APE waveguide is composed of simplified coherently-coupled (SCC) segments. For tuning, finger-type electrodes are deposited on the front-end of the device. When a tuning voltage of 250V is applied to the electrodes, a tunability of 70% is achieved, which is greater than those reported.
Subjects
極化分離器
脊形結構
溼式蝕刻法
Ridge Waveguide
TE/TM Mode Splitter
Wet Etching Method
Type
thesis
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