Ultrathin TiO<sub>2</sub> amorphous films for high transmittance APSM blanks at 157 and 193 nm wavelength simultaneously

Ultrathin TiO₂ amorphous films for high transmittance APSM blanks at 157 and 193 nm wavelength simultaneously

Journal

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Journal Volume

21

Journal Issue

6

Pages

3062-3066

Date Issued

2003-11

Author(s)

F. D. Lai,

C. M. Chang,

L. A. Wang,

T. S. Yih,

URI

Type

journal article