Predictive formulae for OPC with applications to lithography-friendly routing

Journal

Design Automation Conference

Pages

510-515

Date Issued

2008

Author(s)

Chen, T.-C.

Liao, G.-W.

DOI

10.1109/DAC.2008.4555870

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-51549102456&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/341023

Type

conference paper