Design of automatic controllers for model-based OPC with optimal resist threshold determination for improving correction convergence

Resource

Proceedings of SPIE 6924: 69243Z

Journal

Proceedings of SPIE

Pages

-

Date Issued

2008

Date

2008

Author(s)

Su, Yi-Sheng

Ng, Philip C. W.

URI

Type

journal article

File(s)

Name

28.pdf

Size

654.13 KB

Format

Adobe PDF

Checksum

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