The stresses and photoelastic effects in GaAs-GaAlAs multilayer wafers with masked and selective thermal oxidation structure

Resource

Acta Optica Sinica,3(6),542-549.

Journal

Acta Optica Sinica

Journal Volume

3

Journal Issue

6

Pages

542-549

Date Issued

1984-01

Date

1984-01

Author(s)

Liu, H.D.

Feng &amp, Z.C .

Guo, Z.Z.

URI

Type

journal article