Microstructures for Measuring Residual Strains of CMOS Thin Film
Resource
Proc. Int. Conf. Precision Engineering, v. 2, pp. 981-986
Journal
Proc. Int. Conf. Precision Engineering
Journal Volume
v. 2
Pages
981-986
Date Issued
1997-11
Date
1997-11
Author(s)
Chang, P. Z.
Dai, C. L.
Lu, S. S.
Type
conference paper