Novel hydrostatic pressuring mechanism for soft UV-inprinting processes

Resource

Journal of Vacuum Science and Technology B,26,132-136.

Journal

Journal of Vacuum Science and Technology B

Journal Issue

26

Pages

132-136

Date Issued

2008-11

Date

2008-11

Author(s)

Cheng, Fang-Sung

Chen, Chien-Chang

URI

Type

journal article