Layout decomposition for Spacer-is-Metal (SIM) self-aligned double patterning

Journal

20th Asia and South Pacific Design Automation Conference, ASP-DAC 2015

Pages

671-676

Date Issued

2015

Author(s)

Fang, S.-Y.

Tai, Y.-S.

DOI

10.1109/ASPDAC.2015.7059085

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-84926435602&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/393137

Type

conference paper