Ultrathin gate oxides prepared by tensile-stress oxidation in tilted cathode anodization system

Journal

Journal of the Electrochemical Society

Journal Volume

155

Journal Issue

3

Date Issued

2008

Author(s)

Wang, C.-C.

Li, T.-H.

Chuang, K.-C.

Hwu, J.-G.

DOI

10.1149/1.2823494

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-38349127993&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/338626

Type

journal article