Enhanced VOCs Removal by Photocatalytic Oxidation Using Fiber-illuminated Honeycomb Reactor at ppb Level
Date Issued
2014
Date
2014
Author(s)
Wu, Yi-Ting
Abstract
The feature sizes of the wafer in the semiconductor factory will shrink from 28 nanometers to 14 nm in recent years. Under such precise manufacturing process, the control and the detection of low concentration volatile organic compounds (VOCs) are very important because VOCs will affect the quality of the production process in the high-tech clean room. Therefore, low concentration VOCs removal has become a crucial issue in clean rooms for the semiconductor factories.
In this study, fiber-illuminated honeycomb reactor (FIHR) is developed for the removal of VOCs. Photocatalyst with UV light illumination could oxidize the chemical bonds of VOCs and also changes theirs chemical properties. The hydrophobic VOCs may transform into the hydrophilic compounds and then can be removed by a scrubber. FIHR was proved that it can reach the high VOCs’ removal efficiency and CO2 selectivity; it could improve wafer producing quality and extend the lifetime of chemical filter. Furthermore, this research may improve the design of next generation of semiconductor factories.
The design and efficiency of fiber-illuminated honeycomb reactor was investigated in this study. The photocatalyst, TiO2, was prepared by thermal-hydrolysis method. Products of VOCs photoreaction were detected by gas chromatography–mass spectrometry (GC-MS). By using FIHR, we found removal efficiency of m-xylene is significantly enhanced to 96.5 % as compared to 22.0 % for UV irradiation only. Using the FIHR with Mn-TiO2 photocatalyst not only increased the m-xylene removal efficiency, but also increased the CO2 selectivity. Interestingly, Mn-TiO2 in FIHR also showed an extremely reusability, 82 % of removal efficiency was still achieved after 72 hours. Therefore, the FIHR gave very high removal efficiency for VOCs at ppb level under room temperature. The FIHR has great potential for the application in the clean room air purification system in the future.
Subjects
低濃度揮發性有機氣體
光催化氧化
光纖
陶瓷式蜂巢載體
潔淨室
Type
thesis
File(s)![Thumbnail Image]()
Loading...
Name
ntu-103-D96524005-1.pdf
Size
23.54 KB
Format
Adobe PDF
Checksum
(MD5):959001ffaacdeebecf33d0b0ae2b5709