Automatic probe alignment for atomic force microscope

Resource

Mechatronics, 2005. ICM '05. IEEE International Conference on

Journal

IEEE International Conference on Mechatronics, 2005. ICM '05

Pages

-

Date Issued

2005-07

Date

2005-07

Author(s)

Hung, Shao-Kang

Tsai, Chia-Feng

Hsu, Yu-Po

Tzou, Dai-Jie

Lin, Meng-Hu

DOI

N/A

URI

Type

journal article

File(s)

Name

01529383.pdf

Size

238.37 KB

Format

Adobe PDF

Checksum

(MD5):5449fff14790c5b09f7ca4f7ae061345