Fabrication of morphology-tunable SiGe nanostructures grown on glass substrate
Journal
International NanoElectronics Conference, INEC
Date Issued
2011
Author(s)
Chang, H.-K.
Abstract
SiGe nanostructures with different kinds of configurations have been successfully synthesized on glass substrate by chemical vapor deposition. The formation of different SiGe nanostructure can be easily tuned by controlling the growth conditions. The morphologies and compositions of the nanostructures were characterized by SEM and Raman spectroscopy. The present method provides an easy way for flexible nanofabrication and allows the application for manufacturing devices under low temperature processes.
Type
conference paper