Porosity Effects on Properties of Mesoporous Silica Low-k Films Prepared Using Tetraethylorthosilicate with Different Templates

Resource

Journal of The Electrochemical Society 154 (1): G1-G5

Journal

Journal of The Electrochemical Society

Journal Volume

154

Journal Issue

1

Pages

-

Date Issued

2007

Date

2007

Author(s)

Ting, Chih-Yuan

Sheu, Hwo-Shuenn

Wu, Wen-Fa

Wana, Ben-Zu

URI

Type

journal article

File(s)

Name

39.pdf

Size

101.49 KB

Format

Adobe PDF

Checksum

(MD5):e1654f44bf6dff8f1b3e74583f8107eb