Robust Controller Design and Integrate in a Multiple-Axis Piezoelectric Nanopositioning Stage
Date Issued
2012
Date
2012
Author(s)
Tsai, Yan-Chen
Abstract
This paper applies robust control to a piezoelectric nano-positioning stage that has three degrees of freedom (DOF). In addition, we combine the nano-stage with a large stroke platform and a complementary three DOF stage, so that the system can achieve precision positioning in large stroke and has full DOF in the three-dimensional space.
As semiconductor technology develops, the requirement of positioning precision is increasingly stringent. Because of the traditional mechanical hardware structure can not reach the requirement of high precision, we choose the positioning stage with piezoelectric actuator to achieve the high precision position control. We first identify the system’s transfer function matrices and then design controllers to accomplish high precision positioning.
In addition, because the moving range of the piezoelectric nano-positioning stage is limited (100um), we integrate the nano-positioning stage with a large-stroke (10cm) moving platform, to achieve long-range, high-precision positioning.
Further-more, we integrate the nano-positioning stage with a complementary three DOF stage that is equipped with four piezoelectric actuators, to construct a six-DOF platform.
The aforementioned mechanisms are designed and implemented for experimental verification. Base on the results, the proposed systems are deemed effective.
Subjects
robust control
piezoelectric material
piezoelectric positioning stage
semiconductor
nanopositioning
multiple degree of freedom
Type
thesis
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