A Dual Probes AFM System with Effective Tilting Angles to Achieve High-Precision Scanning
Date Issued
2014
Date
2014
Author(s)
Lin, Yi-Ting
Abstract
With the constant improvement of micro/nano-fabrication techniques, the measurement of feature size of micro/nano-fabricated structures becomes an important issue. Atomic force microscopy (AFM) is a high accuracy measurement instrument that has been widely used in measuring of micro/nano-fabricated structures recently. However, due to the monotonic tilting angle of a single probe in a traditional AFM system, the scanning results of the measured sample with high steep wall features usually exhibit distortion phenomenon at the corner part. To solve this problem, a novel dual probe AFM system is proposed in this thesis. A highly flexible system structure is adopted in this work to create different tilting angle of each probe. With the method developed for the right tilting angle, we can obtain the effective tilting angles under different scanning scenarios. In addition, a useful merging method is also designed in this thesis, which can stitch the scanning results from two different scanning units probes together to produce high-precision overall scanning results. Finally, by combining the proposed scan method with some local scan strategy developed in our lab, we can achieve high-speed precision scan. Experimental results are shown to validate the outstanding capability of the proposed methods by applying in our self-development AFM system.
Subjects
atomic force microscopy (AFM)
dual probe scan
probe tilting angle
high-precision scanning
local scan strategy
Type
thesis
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