Fabrication optimization of a micro-spherical fiber probe with the Taguchi method
Resource
J of Micromechanics and Microengineering,18(1),1-7.
Journal
Journal of Micromechanics and Microengineering
Pages
15011
Date Issued
2008-01
Date
2008-01
Author(s)
Fan, K.C.
Wang, W.L.
Chiou H.S.
Type
journal article