Simulation program for the sensitivity and linearity of piezoresistive pressure sensors

Journal

Journal of Microelectromechanical Systems

Journal Volume

8

Journal Issue

4

Pages

514-522

Date Issued

1999

Author(s)

DOI

10.1109/84.809067

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-0033342946&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/346998

Type

journal article