Geometric Design of Obstacles and Analysis of Pumping Performance of Valveless Micropump
Date Issued
2010
Date
2010
Author(s)
Hsiao, Lian-Peng
Abstract
With continuous progress of semiconductor technology, the objective of biomedical detection was miniaturized. The biomedical detecting system was integraled to a chip, and Micropump play a important element in detecting system which provided 20-30 uL/min suitably. Based on the experimental result, the operation frequency and flow rate of micropump were effected by geometric design of obstacle. Compare with Tu(2005), the optimum volume flow rates of typeA and typeB decreased to 56.78 uL/min and 26.18 uL/min with driving voltage of 40V and working frequency of 1.1KHz. The operation frequency and flow rate of micropump were suitable for biomedical detecting chip. In this study, we discussed pumping performance of single obstacle micropump more. The downstream obstacle provided 70% rectified performance in comparison with micropump with two obstacles, and the upstream obstacle provided surplus 30%approximately. The reverse flow micropump with single obstacle happened at high operating frequency. The flow direction could be control by varying operating frequency and driving voltage.
Subjects
valveless micropump
MEMS
single obstacle
reverse flow
Type
thesis
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