The study for dimensional measurement of microholes
Date Issued
2006
Date
2006
Author(s)
Liu, Wei-Cheng
DOI
zh-TW
Abstract
A system for measuring the profile of a microhole is developed. The principle of capacitance is adopted and a device to sense the variation of capacitance when the probe touches the workpiece is designed. With the aid of the rotation stage, positions around the contour can be measured. The measured coordinates are transformed by an algorithm proposed in this paper. The developed system is capable of measuring the interior profile of a high aspect ratio microhole, and caculating its roundness. The estimated repeatability around ±0.78μm is obtained by measuring the grade A gauge block. The maximum depth of a Φ1.0mmmicro-hole that can be measured is 15mm. A Φ1.0mm microhole of 10mm depth was successfully measured and its interior profile was described. Moreover, the roundness of each cross-section at every 1 mm depth increment and the inclination of axis of the micro-hole were calculated.
Subjects
微孔量
測
電容感測
Microhole measuring system
High aspect ratio
Capacitance-sencing
Type
thesis
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