A gasbag-roller-assisted UV imprinting technique for fabrication of a microlens array on a PMMA substrate
Resource
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 20(8), 085038
Journal
Journal of Micromechanics and Microengineering
Pages
85038
Date Issued
2010
Date
2010
Author(s)
Wu, Jing-Tang
Abstract
Roller imprinting has been one of the most effective replication techniques due to its continuous nature and mass productivity. To improve the pressure uniformity and enhance the replication precision, a novel gasbag-roller-assisted UV imprinting process is designed and developed in this study. A belt-type polydimethylsiloxane (PDMS) mold with cavities for forming a microlens array is prepared. A gasbag roller is employed to exert pressure on the contact area between the PDMS mold and a PMMA substrate. Due to the isotropic pressure provided by the gasbag roller, the contact area between the mold and the substrate is increased and the uniformity of the imprinting pressure is enhanced. Precise replication and complete UV curing are thus achieved. A gasbag-roller-assisted UV-based imprinting facility is constructed, and the experiments are conducted. The results prove that a microlens array can be successfully fabricated on a 2 mm thick PMMA substrate. The shape profile and optical property of the microlens are also evaluated.
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Type
journal article
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