Studies of Micro Presure Sensor with High Accuracy
Date Issued
2004
Date
2004
Author(s)
Lin, Chien-Ku
DOI
zh-TW
Abstract
Pressure sensors with different kinds of center boss applied to decrease the nonlinearity of the structure and increase the accuracy of pressure measurement is in investigated. In this paper, exact solutions of circular diaphragm with stiffened ring are derived. Moreover, numerical results of rectangular diaphragm with stiffened boss is calculated by ANSYS software.
Finally, some design cases are studied to compare the performance difference between traditional pressure sensors and this present ones.
Subjects
感測器
微機電
加強材
壓力
boss
sensors
pressure
rigid center boss
Type
thesis
File(s)![Thumbnail Image]()
Loading...
Name
ntu-93-R90525046-1.pdf
Size
23.53 KB
Format
Adobe PDF
Checksum
(MD5):a57beee4f8707ec7b9a8ea44b11db86e