Design and Application of A Resonantor Type Love Wave Oscillator
Date Issued
2006
Date
2006
Author(s)
Wang-Ning, Liu
DOI
en-US
Abstract
Among surface acoustic wave (SAW) sensors, Love wave, which is based on the guiding layer can enhance the energy of SH wave and protect IDT, is suited for using in liquid measurement. By choosing ZnO as a guiding layer, the performance of Love wave sensor will be improved including electromechanical coefficient and temperature coefficient of frequency (TCF). The Polydimethylsiloxane (PDMS) flow cell incorporated on Love wave sensor allows a tiny controlled amount of analyte to be confined solely upon the sensing area between IDTs and prevents unwanted electric interactions with IDTS.
In this thesis, the 133MHz ZnO/ST-cut Quartz based Love wave sensor was fabricated and integrated the amplifier to form a Love wave oscillator. The sensitivity of Love wave sensor was measured higher with lower viscosity and TCF of our design Love wave oscillator was performed 11ppm/ ℃. Dual oscillator configuration was constructed to eliminate most environment factors such as temperature, humidity and etc. Then, the sensing device was used to measure with various glycerin mixed with DI water. In order to investigate the repeatability performance, all the measurement was done three times. The results show our design Love wave sensor is suitable for low viscosity sensing.
Subjects
表面聲波
拉福波感測器
震盪器
流穿式樣品槽
黏滯性
Surface acoustic wave
Love wave
Resonator
ZnO/ST-cut Quartz
Flow cell
Oscillator
Viscosity
Type
thesis
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