Simulation and fabrication results of electron optical systems for massively parallel maskless lithography

Journal
Simulation and fabrication results of electron optical systems for massively parallel maskless lithography
Date Issued
2008
Author(s)
Hoi-Tou Ng
Chien-Chieh Huang
Hsing-Hong Chen
Shin-Chuan Chen
Ken-Hsien Hsieh
Kuen-Yu Tsai*
URI
Type
conference paper

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To permanently archive and promote researcher profiles and scholarly works, Library integrates the services of “NTU Repository” with “Academic Hub” to form NTU Scholars.

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