Industrial-scale Mono-crystalline Si Solar Cells with Surface Hierarchical Antireflection Structure

This thesis is using a simple and suitable for mass production type single crystalline silicon solar cell manufacturing process method to produce the surface hierarchical antireflection. Therefore ,this thesis propose that using metal-assisted chemical etching to etch different size ,density and depth nanopores on micro-scale pyramid texture to form hierarchical antireflection structure. This nano / micro-scale structure enable incident light absorption effectively and low reflectance in 400 nm to 1000 nm. So base on this concept ,we discuss the different nanopores size,depth and density how to impact the reflectance ,conversion efficiency and external quantum efficiency in 400 nm to 1000 nm , and its morphology. We use AgNO3 and HF,called one step metal-assisted chemical etching, to etch the smaller nanopores on micro-scale pyramid texture. We discuss the relationship between nanopores size and conversion efficiency and external quantum efficiency. Seen in this experiment using a low-cost metal assisted one step etching method, the production of single-crystal silicon solar cell surface hierarchical structure of the anti-reflection layer, effectively reduce the reflectivity and improve the external quantum efficiency, to improve the conversion efficiency of solar cells.