Design and Fabrication of an Oscillator-Driven Micropump
Date Issued
2004
Date
2004
Author(s)
Kao, Chi-Teh
DOI
en-US
Abstract
Abstract
We describe here a periodically driven polymer (PDMS) membranes designed to operate as a micro pump. Our device consists of multiple layers including two main components: air chambers with membranes and microchannel respectively. We put a fluidic oscillator which made of acrylic to use actuate membranes that pump fluid in the microchannel underneath. The backbone of the design is the micro-oscillator which requires only a steady air source to transfer into unsteady flow.
In order to drive the fluid under membranes, a basic oscillator design was varied in terms of asymmetric feedback channel geometry. Since a minimum of three membranes is need for peristaltic pump actuation, a center channel is added to the oscillator design, allowing the jet flow to alternate in three directions. The frequency of oscillation is proportion to the pressure of supplied air.
All of components of the device is constructed by using soft lithography. Multilayer structures are combined by bonding layers of PDMS, and each of layers is cast from a micromachined mold separately. The cast is made of photo-resist SU8-100 which is spin-coated onto a glass slide then exposed to UV light to construct air chambers and a microchannel pattern as a replica molding. Pouring PDMS onto the cast, and then placed it on a hot plate to cure. Peeled off PDMS from the cast, then using a plasma oxidation cleaner to bond multi-layer to each other.
For simulations, using CFX 4.4 commercial package, the dimensions were derived from the experimental model. Our result indicate that phase shift was about 180 degree. The experiment is performed by applying constant pressure with a range of 0.3 kg/cm2 to 1.3 kg/cm2 into the fluidic oscillator. By observing tubes between inlet and outlet of microchannel, we got the pumping flow rate with a range of 4 ml/sec to 9 ml/sec.
Subjects
射流震盪器
微幫浦
micropump
fluidic oscillator
Type
thesis
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