Design and Experiment of Range-Extended Fiber Fabry-Perot Interferometer Utilizing the Second Harmonic Displacement Modulation
Resource
Proc. IEEE International Conference on Advanced Intelligent Mechatronics
Journal
2005 IEEE/ASME International Conference on Advanced Intelligent Mechatronics
Pages
88-92
Date Issued
2005
Date
2005
Author(s)
Abstract
Abstract —This paper proposes a new modulation scheme using high order harmonic information to solve the so-called ambiguity problem of interferometry. To start with, we build a Fiber Fabry-Perot Interferometer to serve as a displacement sensor system, which has 70 P m measurement range with 30nm RMS resolution. The experimental result shows that the proposed scheme has the ability to extend the measurement range beyond the limit of the wavelength while keeping the naturally high resolution of interferometry. I. I NTRODUCTION NTERFEROMETRY has excellent sensitivity [1] and is used in various measurements, such as temperature [2], strain [3], magnetic field [4], angular velocity [5], and many other physical parameters [6]. The largest advantage of optical interferometry is also its main disadvantage. Due to the short wavelength of the light, the sensitivity of a single wavelength interferometer is very high, but also due to the short wavelength the dynamic range is limited unless additional information is available. The phase of the light, and hence the phase of the interference pattern, repeats itself at distance intervals equal to the wavelength in a single wavelength interferometric measurement. Thus, an optical path difference (OPD) gives identical interferometric measurement as (
SDGs
Type
conference paper
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