Study of Thermal Batteries Compatible with Micro Electro-Mechanical Devices
Date Issued
2009
Date
2009
Author(s)
Hong, Jia-Qi
Abstract
Energy resources on the earth have been greatly depleted during the past few decades. Nowadays, many researches are dedicated to exploit possible replacement energy sources, particularly to fossil fuels. Among all the candidates, solar cells and fuel cells have been the front-runners, being in the spotlight. Recently, the thermoelectric effect, which can be used to convert heat into electricity, has drawn increasing interest. Power MEMS means a micro mechanical system which itself can provide electric power. Ex: fuel cells and thermal batteries. The latter is a application of thermocouples. In this paper, we report on thermoelectric batteries (TEBs) composed of thermocouples utilizing the Seebeck effect for the purpose of energy scanvenging. They are fabricated with a MEMS-compatible process and, therefore, can be easily monolithically-integrated with MEMS devices. TEBs with different geometries are characterized and compared experimentally.
Subjects
Seebeck effect
thermocouple
thermal battery.
Type
thesis
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