BEOL TDDB reliability modeling and lifetime prediction using critical energy to breakdown.
Journal
IEEE International Reliability Physics Symposium, IRPS 2018, Burlingame, CA, USA, March 11-15, 2018
Pages
6
Date Issued
2018
Author(s)
Abstract
By combining modeling of the leakage current of back end of line (BEOL) capacitors with time dependent dielectric breakdown (TDDB) data, we show that the hard breakdown of capacitors during electrical stress is a direct consequence of the interaction of the leakage current flowing through the dielectric. Moreover, we find the breakdown occurs after a critical energy density has been dissipated in the dielectric. We find that degradation of the dielectric is only associated with Poole-Frenkel (P-F) conduction; tunneling currents do not contribute to the breakdown due to the absence of anode hole injection (AHI) for the metal-insulator-metal (MIM) structure. Hard breakdown times exhibit a √E dependence electric field.
SDGs
Type
conference paper