The thru-line-symmetry (TLS) calibration method for on-wafer scattering matrix measurement of four-port networks
Journal
2004 IEEE MTT-S International Microwave Symposium
Date Issued
2004-06
Author(s)
H.C.Lu
Abstract
The multimode TRL calibration method is known as an approach for the measurement of multi-conductor transmission line devices. The propagation constants of different modes propagating along the multi-conductor transmission line must be different using this method. However, in general multi-port networks, the propagating constants at each port may be equal. We here then present the thru-line symmetry (TLS) calibration method for the calibration of the equal propagation constant case. The calibration equations with the associated calibrators for on-wafer scattering matrix measurement of four-port network are developed. The measured scattering matrix of a branch line coupler using proposed calibration method shows good agreement with simulation. This method can also be extended for the calibration of multi-port networks.
SDGs
Type
conference paper