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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
Architecture for next generation massively parallel maskless lithography system (MPML2)
Details
Architecture for next generation massively parallel maskless lithography system (MPML2)
Journal
Proceedings of SPIE - The International Society for Optical Engineering
Journal Volume
7637
Date Issued
2010
Author(s)
Su, M.-S.
Tsai, K.-Y.
Lu, Y.-C.
Kuo, Y.-H.
Pei, T.-H.
Yen, J.-Y.
YI-CHANG LU
KUEN-YU TSAI
JIA-YUSH YEN
DOI
10.1117/12.846444
URI
http://www.scopus.com/inward/record.url?eid=2-s2.0-77953313243&partnerID=MN8TOARS
http://scholars.lib.ntu.edu.tw/handle/123456789/356047
Type
conference paper