Occurrence of Polytype Transformation during Nitrogen Doping of SiC Bulk Wafer

Resource

Materials Science Forum,Vol. 600-601,39-42.

Journal

Materials Science Forum

Pages

39-42

Date Issued

2008

Date

2008

Author(s)

Chen, J.

Lien, S.C.

Shin, Y.C.

Feng, Zhe Chuan

Kuan, C.H.

Zhao, J.H.

Lu, Wei Jie

DOI

URI

Type

journal article

File(s)

Name

901.pdf

Size

23.15 KB

Format

Adobe PDF

Checksum

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