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Occurrence of Polytype Transformation during Nitrogen Doping of SiC Bulk Wafer
Resource
Materials Science Forum,Vol. 600-601,39-42.
Journal
Materials Science Forum
Pages
39-42
Date Issued
2008
Date
2008
Author(s)
Chen, J.
Lien, S.C.
Shin, Y.C.
Feng, Zhe Chuan
Kuan, C.H.
Zhao, J.H.
Lu, Wei Jie
Type
journal article
File(s)
No Thumbnail Available
Name
901.pdf
Size
23.15 KB
Format
Adobe PDF
Checksum
(MD5):e1df826ccfaccf754a3bba8d8d4453af