Deposition the Transparent and Conductive ZnO Film by an Atmospheric Pressure Plasma Jet

Date Issued

2013

Author(s)

C. M. Hsu

S. T. Lien

Y. J. Yang

J. Z. Chen

I. C. Chen,

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/409173

Event(s)

8th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-8), Hsinchu, Taiwan, Dec. 2013

Type

conference paper