Rapid fabrication of ultraviolet-cured polymer microlens arrays by soft roller stamping process
Journal
Microelectronic Engineering
Journal Volume
84
Journal Issue
2
Pages
355-361
Date Issued
2007
Author(s)
Abstract
This paper reports an innovative technique for rapid fabrication of ultraviolet-cured polymer microlens arrays based on soft roller stamping process. In this method, a soft roller with microlens array cavity is made by casting a pre-polymer of polydimethylsiloxane (PDMS) in a plastic master of microlens array. The plastic master is prepared using gas-assisted hot embossing of polycarbonate (PC) film over a silicon mold with micro-holes array. The microlens array cavity on the soft roller is filled with liquid UV curable polymer first. The roller rolls and stamps over the traveling transparent substrate. The microlens array pattern is formed. At the same time, the pattern on the substrate is cured by the UV light radiation while traveling through the rolling zone. In this study, a roller stamping facility with UV exposure capacity has been designed, constructed and tested. The replication quality, surface roughness and optical property of the replicated microlens arrays are measured, analyzed and proved satisfactory. This study demonstrates the potential of soft roller stamping for continuous rapid mass production. © 2006 Elsevier B.V. All rights reserved.
Type
journal article