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College of Electrical Engineering and Computer Science / 電機資訊學院
Electrical Engineering / 電機工程學系
Freestanding Microheaters in Si with High Aspect Ratio Microstructures
Details
Freestanding Microheaters in Si with High Aspect Ratio Microstructures
Journal
48th AVS international Symposium
Date Issued
2001-11
Author(s)
WEI-CHENG TIAN
S. W. Pang
URI
http://scholars.lib.ntu.edu.tw/handle/123456789/294522
Type
conference paper
