Development and Research of A Piezoelectric Actuator for the Scanning Tunneling Microscope used in Ultrahigh Vacuum
Date Issued
2004
Date
2004
Author(s)
Lee, Chi-Jui
DOI
zh-TW
Abstract
The aim of the thesis is to develop a piezoelectric actuator for the Scanning Tunneling Microscope used in Ultrahigh Vacuum (UHV STM). The actuator is operated with the inchworm actuating principle. This actuator system includes piezoelectric elements, clamping device and driving mechanism. A piezoelectric stack element is actuated to drive the flexure mechanism, so that the clamping device can release or clamp the scanning tube. The flexure mechanism is manufactured by the wire electrical discharge machine. With the pre-stress, the flexure mechanism can provide precise guiding and stable actuation. Firstly according to measured properties of piezoelectric elements, the characteristics of the clamping device are analytically and empirically studied. At last through the performance tests such as displacement, speed, force and resolution, the influences of design and operation parameters on the system performance are investigated.
Subjects
壓電致動器
掃描穿隧式顯微鏡
撓性機構
夾持系統設計
尺蠖式
ultrahigh vacuum
STM
clamping system design
inchworm
flexures
piezoelectric actuator
Type
thesis
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