Magnetically actuated swing-type micromirror
Journal
International Conference on Optical MEMS and Nanophotonics
Pages
71-72
Date Issued
2013
Author(s)
Abstract
This paper presents a 45°-assembled swing-type micromirror fabricated with the SOIMUMPs process. Magnetic beads are attached to the backside of the mirror, making it possible to actuate the mirror magnetically. A swing range of > 16° is achieved. The device can be used in optical interconnects and optical pickup heads.
SDGs
Type
conference paper