A large-stroke MEMS deformable mirror fabricated by low-stress fluoropolymer membrane

Journal

IEEE Photonics Technology Letters

Journal Volume

20

Journal Issue

10

Pages

830-832

Date Issued

2008

Author(s)

Chen, T.-Y.

Chiu, C.-W.E.

GUO-DUNG JOHN SU

DOI

10.1109/LPT.2008.921134

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-43449130122&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/340732

Type

journal article