Integration of CNT with TIA into gas sensors
Journal
2006 International Conference on Electronic Materials and Packaging, EMAP
Date Issued
2006
Author(s)
Abstract
This paper explores the use of single-walled carbon nanotubes (SWCNTs) as a gas sensor for detecting organic gas molecules. A low-temperature dielectrophoresis (DEP) method is employed to combine CNTs with Transimpedance Amplifier (TIA) based on UMC 0.18 um 1P6M CMOS process into a nanosensor device.
Type
conference paper