Submicron-size patterning on the sapphire substrate prepared by nanosphere lithography and nanoimprint lithography techniques

Journal

Metals and Materials International

Journal Volume

19

Journal Issue

4

Pages

869-874

Date Issued

2013

Author(s)

Chang, C.-M.

Shiao, M.-H.

Chiang, D.

Yang, C.-T.

Huang, M.-J.

Hsueh, W.-J.

DOI

10.1007/s12540-013-4031-5

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/451910

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84879954469&doi=10.1007%2fs12540-013-4031-5&partnerID=40&md5=af9a623b70a2794777481f8ffc0320ac

Type

journal article