Latest advances in nano- & micro-scale 3-D surface profilometric technologies for in-situ automated optical inspection (AOI)
Journal
International Measurement Confederation (國際量測聯邦): 11th IMEKO (LMPMI) 2014 (2-5 Sep), 擔任 Keynote Talk
Pages
Abstract only
Date Issued
2014
Author(s)
Liang-Chia Chen
Description
Tsukaba, Japan.
Type
conference paper