A paper-like micro-supercapacitor with patterned buckypaper electrodes using a novel vacuum filtration technique
Journal
IEEE International Conference on Micro Electro Mechanical Systems
Journal Volume
2015-February
Journal Issue
February
Pages
1067-1070
Date Issued
2015
Author(s)
Abstract
This study reports a paper-like micro-supercapacitor (SC) with in-plane interdigital buckypaper electrodes on a filter membrane substrate. A vacuum filtration method assisted by lithography techniques is proposed for patterning buckypaper. The proposed micro-SC features advantages including a flexible structure, simple fabrication, easy chip integration, and high specific capacitance. Increasing the aspect ratio of the patterned buckypaper electrodes effectively enhances the specific capacitance of the SC. The specific capacitance measured by cyclic voltammetry was 107.27 mF/cm 2 at a scan rate of 20 mV/sec. The measured charge-discharge behaviors at various discharge rates show the electrochemical stability of the device.
SDGs
Type
conference paper
