HOE-AFM with Translational and Angular Measurements

Journal

2014 International Conference on Mechatronics Technology (ICMT 2014)

Date Issued

2014

Author(s)

Bo-Jing Juang

Hsien-Shun Liao

Tien-Jen Chang

En-Te Hwu

Ing-Shouh Hwang

Kuang-Yuh Huang

URI

Description

Taipei, Taiwan

Type

conference paper