Occurrence of Polytype Transformation during Nitrogen Doping of SiC Bulk Wafer
Resource
Materials Science Forum 600-601: 39-42
Journal
Materials Science Forum 600-601:
Pages
39-42
Date Issued
2008
Date
2008
Author(s)
Chen, J.
Lien, S. C.
Shin, Y. C.
Feng, Z. C.
Kuan, C. H.
Zhao, J. H.
Lu, W. J.
Type
journal article