Development of Optical Switch Using Bi-stable Electro-magnetic Actuators
Date Issued
2008
Date
2008
Author(s)
Shih, Sun-Chih
Abstract
In this work, a novel hybrid 8 × 8 optical switch system is presented. The hybrid switch comprises a MEMS-based micro-mirror array structure and an actuator array. The micro-mirror array structure, including micro-mirrors, cantilevers, and light-path trenches, can be realized by using KOH anisotropic etching process. Also, the actuator array includes 64 bi-stable solenoid-based actuators. Each micro-mirror on the mirror array is actuated by the bi-stable solenoid-based actuator, and the power consumption of the system can be greatly reduced. We also develop a driving circuit for solenoid-based actuator array and a Window-based program for controlling the optical switch system. Device characterizations and optical performance are also investigated. The typical surface roughness of the mirrors is about 83.3nm. The switching time is 5ms from ON state to OFF state and 8ms from OFF state to ON state, respectively. The required time for applying voltage on the actuators is less than 5ms for switching between two stable states. The measured insertion loss is about -3.7dB. The insertion loss deviation is about 0.02dB after 100 switching cycles and 0.2dB after 10,000 switching cycles. The temperature raising are 0.3℃, 4.5℃ and 23.1℃ corresponding to the operation frequencies of 1Hz, 10Hz, and 50Hz.
Subjects
optical switch
optical communication
MEMS
KOH etching
self-alignment
bi-stable actuator
Type
thesis
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