Polymer-based photonic crystals fabricated with single-step electron-beam lithography
Journal
Advanced Materials
Journal Volume
19
Journal Issue
19
Pages
3052-3056
Date Issued
2007
Author(s)
Abstract
A suspended PMMA quasi-3D PC slab with a hexagonal array of air holes fabricated by using a single-step electron-beam lithography process is shown in the figure (PMMA = polymethylmethacrylate). The extension of the single-step lithography technique to the fabrication of 3D multilayer nanostructures with photonic band gaps in the visible-light region is demonstrated.
Type
journal article