The Formation of Nano-Size SiO2 Thin Film on an Aluminum Plate with Hexamethyldisilazane (HMDSA) and Hexamethyldisiloxane (HMDSO)
Resource
Journal of Thermal Science 12 (1): 89-96
Journal
Journal of Thermal Science
Journal Volume
12
Journal Issue
1
Pages
89-96
Date Issued
2003
Date
2003
Author(s)
Ma, H. K.
Zhao, E.
Yeh, C. L.
Chung, K. M.
Type
journal article