Predictive formulae for OPC with applications to lithography-friendly routing.

Journal

Proceedings of the 45th Design Automation Conference, DAC 2008, Anaheim, CA, USA, June 8-13, 2008

Pages

510-515

Date Issued

2008

Author(s)

Chen, Tai-Chen

Liao, Guang-Wan

DOI

URI

URL

Type

conference paper